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Active vibration isolation of high precision machines

  • C. Collette (a1), S. Janssens (a1), K. Artoos (a1) and C. Hauviller (a1)

Abstract

This paper provides a review of active control strategies used to isolate high-precisionmachines (e.g. telescopes, particle colliders, interferometers, lithography machines or atomic force microscopes) from external disturbances. The objective of this review is to provide tools to develop the best strategy for a given application. Firstly, the main strategies are presented and compared, using single degree of freedom models. Secondly, the case of huge structures constituted of a large number of elements, like particle colliders or segmented telescopes, is considered.

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Corresponding author

Email address for correspondence: christophe.collette@cern.ch

References

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Active vibration isolation of high precision machines

  • C. Collette (a1), S. Janssens (a1), K. Artoos (a1) and C. Hauviller (a1)

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