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Active vibration isolation of high precision machines

  • C. Collette (a1), S. Janssens (a1), K. Artoos (a1) and C. Hauviller (a1)


This paper provides a review of active control strategies used to isolate high-precisionmachines (e.g. telescopes, particle colliders, interferometers, lithography machines or atomic force microscopes) from external disturbances. The objective of this review is to provide tools to develop the best strategy for a given application. Firstly, the main strategies are presented and compared, using single degree of freedom models. Secondly, the case of huge structures constituted of a large number of elements, like particle colliders or segmented telescopes, is considered.


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Active vibration isolation of high precision machines

  • C. Collette (a1), S. Janssens (a1), K. Artoos (a1) and C. Hauviller (a1)


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