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X-ray Topography of Surface Layers and Epitaxial Films

  • D. Keith Bowen (a1)

Abstract

The techniques of X-ray topography are reviewed, with special reference to their application to the study of surface layers and thin films. The methods of section topography, white radiation topography and double and triple crystal topography are shown to be the most appropriate, with grazing or glancing incidence methods assuming special importance. Applications to the questions of epilayer mismatch and dislocation content, process-induced defects and surface damage are discussed.

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1 Tanner, B. K., this volume.
2 Barrett, C. S., Trans. AIME, 161: 15 (1945).
3 Chikawa, J. I., in Characterization of Crystal Growth Defects by X-ray Methods,(eds. Tanner, B. K. & Bowen, D. K.) Plenum, New York, 1980
4 Bowen, D. K. & Hall, C. R., Microscopy of Materials, MacMillan, London, 1975.
5 Miltat, J., in Characterization of Crystal Growth Defects by X-ray Methods, (eds. Tanner, B. K. & Bowen, D. K.) Plenum, New York, 1980
6 Hmelo, A. B., Bilello, J. C., Davies, S. T. & Bowen, D. K., Mats. Letts. 2: 6 (1983).
7 Tanner, B. K. & Bowen, D. K. (eds.) Characterization of Crystal Growth Defects by X-ray Methods, Plenum, New York, 1980; see in particular the chapters by Lang, A. R., Chikawa, J. I., Miltat, J. & Armstrong, R. W..
8 Epelboin, Y., J. Appl. Crystallogr., 7: 372 (1974).
9 Batterman, B. K. & Cole, H., Rev. mod. Phys. 36: 681 (1964).
10 Afanasiev, A. M., Aleksandrov, P. A., Imamov, R. M., Pashaev, E. M. & Polovinkina, V. I., Phys. Status Solidi, (a)90;419 (1985).
11 Dudley, M., Wu, J. & Yao, G. D., Nucl. Instrum. & Methods in Phys. Res., B40/41: 388 (1989).
12 Tanner, B. K. & Bowen, D. K. (eds.) Characterization of Crystal Growth Defects by X-ray Methods, Plenum, New York, 1980; see in particular the chapters by Meieran, E. S., Chikawa, J. I., Hart, M. & Sauvage, M..
13 Bensoussan, S., Ph.D. thesis, University of Paris VI, 1986.
14 Jenichen, Bernd, Kohler, Rolf & Mohling, Werner, J. Phys. E: Sci. Instrum., 21: 1062 (1988).
15 Ishikawa, T., Kitano, T. and Matsui, J., J. Appl. Crystallogr. 20, 344 (1987).
16 Riglet, P., Sauvage, M., Petroff, J. F. & Epelboin, Y., Phil, Mag. 42: 339 (1980).
17 Halliwell, M. A. G., this volume.
18 Tuppen, C. G., Gibbings, C. J. & Hockley, M., J. Cryst. Growth, 94: 392 (1989).
19 Cui, S. F., Green, G. S. & Tanner, B. K., Proc. M.R.S. (1989) in press.
20 Abdul Gani, S. M., Tanner, B. K., Hingle, H. T., McKenny, T. G. & Bowen, D. K., J. Appl. Crystall., 17: 111 (1984).
21 Hart, L., Fisher, G. R. & Bowen, D. K., this volume.
22 Stock, S. R., Chung, Y. H. and Rek, Z. U., J. Appl. Cryst., 22: 70 (1989).

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