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X-Ray Studies of Chromium Nitride (CrxNy) Thin Films Deposited by Reactive Magnetron Sputtering

  • M. Charbonnier (a1), M. Romand (a1), A. Roche (a1) and J.P. Terrat (a2)

Abstract

Chromium nitride hard coatings have been prepared by a plasma process by varying nitrogen partial pressure. The crystallographic structure of these samples has been investigated by XRD and their chemical composition and stoichiometry by Low Energy Electron Induced x-ray Spectrometry (LEEIXS).

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1. Bador, R., Romand, M., Charbonnier, M., and Roche, A., Adv. in X-ray Anal., 24 : 351 (1981).
2. Romand, M., Bador, R., Charbonnier, M., and Gaillard, F., X-ray Spectrom., 16: 7 (1987).10.1002/xrs.1300160104
3. Romand, M., Gaillard, F., Charbonnier, M., and Urch, D., Adv. in X-ray Anal 34: (1991).
4. Charbonnier, M., Gaillard, F., Romand, M., and Urch, D., Adv. in X-ray Anal., 34: 139 (1991).
5. Fabis, P. M., Cooke, R. A., McDonough, S., J.Vac, Sci. Technol., A 8 (5): 3809 (1990).10.1116/1.576454
6. Fabis, P. M., Cooke, R. A., McDonough, S., J.Vac. Sci. Technol., A 8 (5): 3819 (1990).10.1116/1.576455
7. Shih, K. K., Doue, D. B., Crowe, J. R., J.Vac. Sci. Technol., A 4 (3): 564 (1986).10.1116/1.573887
8. Valdova, V., Kuzel, R., Jr. and Cerny, C., Thin Solid Films. 156: 53 (1988).
9. Buschert, R, C., Gibsow, P. N., Gissler, W., Haupt, J., Manara, A., Surf. Interf. Anal., 16 : 510 (1990).10.1002/sia.7401601106
10. Komiya, S., Ono, S., Umezu, N., Narusawa, T., Thin Solid Films. 45 :433 (1977).10.1016/0040-6090(77)90230-9
11. Kashiwagi, K., Kobayashi, K., Masuyama, A., Murayama, Y., J.Vac. Sci. Technol., A 4 (2): 210 (1986).10.1116/1.573472
12. Jehn, H, A., Grallath, E., Le Roux Strydom, I., Hofmann, S., Surf. Interf. Anal., 16:540(1990).10.1002/sia.7401601112
13. Hofmann, S.. J.Vac. Sci. Technol., A4(6): 2789 (1986).10.1116/1.573680

X-Ray Studies of Chromium Nitride (CrxNy) Thin Films Deposited by Reactive Magnetron Sputtering

  • M. Charbonnier (a1), M. Romand (a1), A. Roche (a1) and J.P. Terrat (a2)

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