Skip to main content Accessibility help

Structural Characterization of Thin Films by X-Ray Diffraction and Reflectivity

  • Daniel T. Brower (a1), Brian S. Medower (a1) and Ting C. Huang (a2)


X-ray polycrystalline diffraction was used to track progress toward improving the structural properties of SrS:(Eu,Sm) thin films. These thin films are used as the active layer of the ETOM (Electron Trapping Optical Memory) media. In this study conventional x-ray diffraction and x-ray reflectivity were used to evaluate the effect of two deposition parameters on film structures. Line broadening analysis performed using the Warren-Averbach technique showed the beneficial effects of a hydrogen sulfide reactive atmosphere and the RF magnetron sputtering technique on crystallite size and microstrain. A factor of five improvement in crystallite size and a factor of two reduction in microstrain was observed. Film thickness, density, and interfacial and surface roughnesses were determined for two SrS thin films. The sin2Ψ technique was used to determine the in-plane biaxial stress for two films prepared by different deposition techniques. These films exhibit inhomogeneous stress states with an average stress of less than IMPa.



Hide All
1 Brower, D., Earman, A., and Chaffin, M. H., in Proceedings of the Goddard Conference on Mass Storage Systems and Technologies, ed. Kobler, B., Berbert, J., and Hariharan (1992).
2 Movchan, B. A. and Demchishin, A. V., Phys. Met. Metallogr. 28, 83 (1969).
3 Stokes, A. R., Proc. Phys. Soc. London 61, 382 (1948).
4 Warren, B. E., Progress in Metal Physics, 8, ed. Chalmers, B. and King, R., London; Pergamon Press, 146 (1959),
5 Warren, B. E., X-ray Diffraction, Reading, MA, Addison-Wesley (1969).
6 Balzar, D., J. Appl. Cryst. 25, 559 (1992).
7 Bennedetti, A., Fagherazzi, G., Enzo, S., and Battagliarin, M., J. Appl. Crys 21, 543 (1988).
8 Noyan, I. C. and Cohen, J. B., Residual Stress, New York, NY, Springer- Verlag (1987).
9 Klug, H. and Alexander, L., X-ray Diffraction Procedures, 2nd ed., New York, NY, John Wiley and Sons, 760 (1974).
10 Kiessig, H., Ann. Phys, (Leipzig) 10, 769 (1931).
11 Parratt, L. G., Phys. Rev., 95, 359 (1954).
12 Meyerheim, H. L. and Goebel, H. E., Thin Solid Film., 199, 343 (1991).
13 Huang, T. C., Nozieres, J. P., Speriosu, V. S., Lefakis, H., and Gurney, B., Appl. Phys. Lett., 60, 1573 (1992).
14 Segmüller, A., Thin Sohd Film., 18, 287 (1973).
15 Lengeler, B., Adv. X-Ray Anal 35A, A (1992).
16 Huang, T. C., Gilles, R., and Will, G., Thin Solid Film., 230, 99 (1993).
17 Huang, T. C. and Parrish, W., Adv. X-Ray Anal 35A, A (1992).
18 Segmüller, A., AIP Conf. Proc., 53, 78 (1979).
19 Enzo, S. and Parrish, W., Adv. X-ray Anal., 27, 37 (1984).
20 Soltani, P., ‘Mechanical properties of alkaline-earth sulfide thin films', PhD Thesis, University of Maryland-College Park (1994).
21 NAF11, modified for PC by the Mineralogical Institute of the University of Bonn

Structural Characterization of Thin Films by X-Ray Diffraction and Reflectivity

  • Daniel T. Brower (a1), Brian S. Medower (a1) and Ting C. Huang (a2)


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed