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Soft and Ultra-Soft X-ray Spectrometry Using Long-Wavelength Dispersive Devices

  • M. Charbonnier (a1), F. Gaillard (a1), M. J. Romand (a1) and D. S. Urch (a1)

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X-ray emission spectrometry is of great practical interest because the method is rapid, non destructive and quantitative. However, the analysis of light elements which emit highly absorbed long wavelength radiations is always difficult. Although recent development of multilayered microstructures as dispersive devices has brought higher count rates for light elements, the improvement of performance in the relevant energy range depends, largely, on the improvement of the excitation. For this purpose, an electronic source providing a non-focused low energy electron beam constitutes a means of obtaining a very efficient excitation. As a result, we have used such an excitation to compare the performances of some layered synthetic microstructures (LSM) and conventional crystals for the detection of soft and ultra-soft xrays, to show up a few spectral interferences and to solve them by choosing the best dispersive device. Among the cases studied, we have shown how to carry out an accurate analysis of boron in borophosphosilicate glass (BPSG) samples. Finally a survey of the lower detection limits obtained for different elements using different dispersive devices was done.

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1. Bador, R., Romand, M., Charbonnier, M. and Roche, A., Adv. in x-ray Anal. 24: 351 (1981).
2. Roche, A.. Charbonnier, H., Saillard, F., Romand, M. and Bador, R., Appl. Surf. Sci. 9:227 (1931).
3. Romand, M., Bador, R., Charbonnier, M. and Gaillard, F., X-ray Spectrometry 16: 7 (1987).
4. Charbonnier, M., Romand, K. and Gaillard, F., Analysis 16(Suppl. 9-10);17 (1988).
5. Romand, M., Gaillard, F., Charbonnier, M. and Urch, D., 39tb Annual Denver X-ray Conference (1990).
6. Charbonnier, M., Romand, H., and Grubis, B., X-ray Spectrometry 17: 149 (1988).
7. Arai, T., Shoji, T., and Ryon, R. W., Adv. in X-ray Anal. 28: 137 (1984).
8. Eenbergen, A. V., and Volbert, B., Adv. in X-ray Anal. 30:201 (1988).
9. Nicolosi, J. A., Groven, J. P., and Merlo, P., Adv. in X-ray Anal. 30: 183 (1986).
10. Arai, T., Adv. in X-ray Anal. 30: 213 (1986).
11. White, R. L., and Huang, T. C., Adv. in X-ray Anal, 32: 331 (1983).
12. Anzelmo, J. A., and Boyer, B. V., Adv. in X-ray Anal. 30: 193 (1986).
13. Huang, T. C., Fung, A., and White, R. L., X-ray Spectrometry 18(2):53 (1989).
14. Price, B. J., Internat. Labmate 13(7):17 (1988).
15. Sella, C., Youn, K., Barchewitz, R., Arbaoui, H., and Krishnan, H., Thin Solid Films 164: 405 (1988).
16. Schuster, M., Müller, L., Mauser, K. E., and Straub, R., Thin Solid Films. 157: 325 (1988).
17. Houdy, P., and Chauvineau, J. P., Le Vide, Les Couches Minces 245: 59 (1989).
18. Madden, H., Cox, J. N., Fruechting, B., and Matteau, J., Solid State Technol. 53 (1989).

Soft and Ultra-Soft X-ray Spectrometry Using Long-Wavelength Dispersive Devices

  • M. Charbonnier (a1), F. Gaillard (a1), M. J. Romand (a1) and D. S. Urch (a1)

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