Skip to main content Accessibility help
×
Home

Separation of Txrf Peaks and Background Using a Spreadsheet

  • D. B. Brown (a1), B. Cordis (a2), J. V. Gilfrict (a3) and CM. Dozier (a1)

Abstract

In TXRF analysis of impurities in Si wafers, one of the analytical problems is the separation of the peaks of interest (e.g., fluorescence peaks from Fe or Cr) from various background artifacts. These background artifacts include (a) a large Si Kα fluorescence peak, (b) a large peak from the scattered and diffracted primary beam (e.g., W Lβ), (c) a continuum background, (d) scattered radiation in the vicinity of the primary beam peak, (e) an escape peak from the primary beam peak, and (f) spurious Fe and Ni peaks from the detector. This paper will present a scheme for the separation of these components using a fitting procedure based on a commercial spreadsheet.

Copyright

References

Hide All
1. WeisDrod, U., Gutschke, R., Kirath, J., and Schwenke, H., “Total Reflection X-Ray Fluorescence Spectrometry for Quantitative Surface and Layer Analysis”, Applied Physics A53, 449-456 (1991).
2. Knoth, J., Schwenke, H., and Weisbrod, U. , “Total reflection X-ray fluorescence spectrometry for surface analysis”, Spectrochernica Acta, Vol 44B, 477-481 (1989).
3. Yakushiji, Kenji, Ohkawa, Shinji, Yoshinaga, Atsushi, and Harada, Jimpei , “Main Peak Profiles of Total Reflection X-Ray Fluorescence Analysis of Si(001) Wafers Excited by Monochromatic X-Ray Beam W-Lβ (I)”, Jpn. J. Appl. Phys. 31, 28722876 (1992).
4. See, for example, the discussion of pulse pile-up and the action of the pile-up rejector in Quantitative X-Ray Spectrometry, by Ron Jenkins, Gould, R. W., and Dale Gedcke (Marcel Dekker, New York, 1981).
5. Yakushiji, Kenji, Ohkawa, Shinji, Yoshinaga, Atsushi, and Harada, Jimpei, “Main Peak Profiles of Total Reflection X-Ray Fluorescence Analysis of Si(001) Wafers Excited by Monochromatic X-Ray Beam W-Lβ (II)”, Jpn. J. Appl. Phys. 32, 11911196 (1993).
6. Private communication, J. Metz, Charles Evans, Inc.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed