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A Scheme for Fully Quantitative Energy Dispersive Microprobe Analysis

  • D.G.W. Smith (a1) and C.M. Gold (a1)

Abstract

A procedure and program are described for rapid, economical and simple production of fully quantitative, multi-element analyses from energy dispersive microprobe data. Methods are outlined for background shaping and scaling, comprehensive overlap correction, and adjustment for instrumental drift. Program facilities include the output of all coefficients required, built-in standard data, the option to use default standards when no working standards have been measured, and the ability to respecify standards during data processing.

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1. Reed, S.J.B. and Ware, N.G., “Quantitative Electron Microprobe Analysis using a Lithium Drifted Silicon Detector”, X-ray Spectrom. 2, 6974 (1973).
2. Reed, S.J.B. and Ware, N.G., “Escape Peaks and Internal Fluorescence in X-ray Spectra Recorded with Lithium Drifted Silicon Detectors”, J. Phys. E: Sci. Instr. 5, 582584 (1972).
3. Smith, D.G.W., Gold, C.M. and Tomlinson, D.A., “The Atomic Number Dependence of the X-ray Continuum Intensity and the Practical Calculation of Background in Energy Dispersive Electron Microprobe Analysis”, X-ray Spectrom. 4, 149156 (1975).
4. Duncumb, P. and Reed, S.J.B., “The Calculation of Stopping Power and Backscatter Effects in Electron Probe Microanalysis”, Mat. Bur. Stand. (U.S.), Spec. Publ. 298 , 133154 (1968).
5. Philibert, J., “A Method for Calculating the Absorption Correction in Electronprobe Microanalysis”, in Pattee, H.H., Coslett, V.E., and Engstrom, A., Editors, Third International Symposium on X-ray Optics and X-ray Microanalysis, p. 379392, Academic Press, New York (1963).
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8. Springer, G., “Fluorescence by Continuous Radiation in Multi-Element Targets”, in Shinoda, G., Kohra, K. and Ichinokawa, T., Editors, Proc. 6th International Conf. X-ray Optics and Microanalysis, p. 141146, Univ. Tokyo Press (1972).

A Scheme for Fully Quantitative Energy Dispersive Microprobe Analysis

  • D.G.W. Smith (a1) and C.M. Gold (a1)

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