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Quantitative Microprose Analysis with Energy Dispersive Detectors - A Status Report

  • E. Lifshin (a1)

Abstract

Methods for quantitative microprobe analysis of flat samples with energy dispersive spectrometers are reviewed for the case when the electron beam is well contained in the analyzed region. Particular attention is paid to models for background subtraction and peak overlap necessitated by limited energy resolution. Present indications are that careful data collection procedures can often lead to accuracy comparable to crystal diffraction spectrometers.

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Quantitative Microprose Analysis with Energy Dispersive Detectors - A Status Report

  • E. Lifshin (a1)

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