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Interrelationships of Sample Composition, Backscatter Coefficient, and Target Current Measurement

  • Kurt F. J. Heinrich (a1)

Abstract

The use of target current measurements in the electron microprobe for quantitative analysis of binary samples has been proposed by several authors. However, the equations proposed for calculations as well as instrumental conditions differ considerably. The present paper relates the target current measurements made with the Applied Research Laboratories microprobe to the backscatter coefficients determined independently. Equations for analyzing binary samples as well as applications to line scans and concentration mapping are given.

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