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Heavy Ion-Induced Characteristic X-Ray Generation as an Analytical Probe

  • J. A. Cairns (a1), D. F. Holloway (a1) and R. S. Nelson (a1)

Abstract

Increasing attention is currently focused on the generation of characteristic x-ray by proton irradiation. This has the advantage of yielding “clean” x-ray- i. e. free from background brerasstrahlung radiation, from even the lightest elements. The disadvantage is that the yields are naturally much lower than those produced by electrons of the same energy. A recent study has extended characteristic x-ray production to a variety of heavy ions and has shown that the cross- sections for the production of clean x-rays are often higher , by as much as several orders of magnitude, than those produced by protons of the same energy. In addition, there has emerged a further advantage, viz. the ability of specially chosen heavy ions to excite characteristic x-ray from a particular element in a selective manner. Since heavy ions penetrate only a few hundred Angstroms in to most solids, the phenomenon can be used as the basis of a technique for the examination of surface deposits, or to measure depth distributions of impurities. For example, Kr ions can be used t o determine the range distribution of antimony which had been implanted in to silicon at 100 keV. The antimony concentration was determined as a function of ∼ 150 Å steps, and was found to exhibit a maximum concentration of ∼ 1 part in 103 of silicon at 450 Å below the surface, falling to zero concentration at ∼2000 Å a depth. In the past, in order to obtain the required degree of sensitivity, such range determinations have relied on radio active tracer techniques.

An entirely new type of proportional counter has been developed during the course of these studies. This instrument, because of its special construction, can be positioned very close to targets in non-dispersive studies, so as to collect the highest possible fraction of emitted x-ray. It incorporates a replaceable anode unit, together with a built- in miniature head amplifier, and exhibits extremely good performance, particularly for ultra-soft x-ray. In addition, rotation of a dial on the end of the counter body allows alteration of the active gas volume during operation, and so permits tuning into x-rays of a particular energy.

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References

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1. Merzbacher, E. and Lewis, H. W., “X-Ray Production by Heavy Charged Particles,” in Flügge, S., Editor, Encyclopedia of Physics, Vol. 34, p. 166192, Springer-Verlag, Berlin (1958).
2. Poole, D. M. and Shaw, J. L., “Microanalysis with a Proton Probe,” in Mollenstedt, G. and Gaukler, K. H., Editors, 5th International Congress on X-Ray Optics and Microanalysis, p. 519-324, Springer-Verlag, Berlin (1968).
3. Cairns, J. A., Holloway, D. F. and Nelson, R. S., “Characteristic X-Ray Generation by Heavy Particle Irradiation of Copper,” in Palmer, D. W., Thompson, M. W. and Townsend, P. D., Editors, Atonic Collision Phenomena in Solids, p. 541552, North Holland Publishing Company (1970).
4. Fortner, H. J., Curry, B. P., Der, R. C., Kavanagh, T. M. and Khan, J. M., “X-Ray Production in C+-C Collisions in the Energy Range 20 keV t o 1.5 MeV,” Phys. Rev., 185, 164167 (1969).
5. Saris, F. W. and Onderdelinden, D., “Cross Sections for Ar L-Shell and Ne K-Shell X-Ray Emission in Heavy Ion-Atom Collisions,“ Physica, to be published (1970).
6. Fano, U. and Lichten, W., “Interpretation of Ar+-Ar Collisions at 50 keV,” Phys. Rev. Letters, l4, 627629 (1965).
7. Cairns, J. A., Larkins, F. P. and Nelson, R. S., “Characteristic X-Ray Production by Heavy Ion Bombardment of Solids ,” to be published.
8. Cairns, J. A. and Nelson, R. S., “The Use of Energetic Heavy Ions to Generate Characteristic X-Rays from Elements in a Selective Manner,” A.E.R.E. (Harwell) Report No. R-6408, (Part 1), Submitted to Radiation Effects (1970).
9. Cairns, J. A., Holloway, D. F. and Nelson, R. S., “Measurement of the Concentration Distribution of Ion Implanted Antimony in Silicon by the use of Selective Heavy Ion X-Ray Excitation,” A.E.R.E. (Harwell) Heport Ho. R-6408, (Part 2), Submitted to Radiation Effects (1970).
10. Cairns, J. A., Holloway, S. F. and Nelson, R. S., “Measurement of Boron Concentration Profiles in Implanted Silicon using Selective X-Ray Generation,” to be presented at European Conference on Ion Implantation, University of Reading, England, 7-9th September, (1970).
11. Cairns, J. A., Desborongh, C. L. and Holloway, D. F., “A Hew End-Window Variable Geometry X-Ray Proportional Counter,” A.E.R.E. (Harwell) Report Ho. R-6H2, Submitted to Nuclear Instruments and Methods (1970).
12. Cairns, J. A., Desborongh, C. L. and Holloway, D. F., “Selectivity of X-Ray Detection by a Variable Geometry Proportional Counter,” Nature, 222, p. 12621263, (1969).

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