Hostname: page-component-7bb8b95d7b-lvwk9 Total loading time: 0 Render date: 2024-09-24T03:37:07.411Z Has data issue: false hasContentIssue false
  • English
  • Français

Grazing Incidence X-Ray Scattering Studies of Single Quantum Wells

Published online by Cambridge University Press:  06 March 2019

S. Bates ,
P.D. Hatton ,
C.A. Lucas ,
T.W. Ryan ,
S.J. Miles  and
B.K. Tanner
S. Bates
Affiliation:
Department of Physics, University of Edinburgh Mayfield Rd., Edinburgh, U.K.
P.D. Hatton
Affiliation:
Department of Physics, University of Edinburgh Mayfield Rd., Edinburgh, U.K.
C.A. Lucas
Affiliation:
Department of Physics, University of Edinburgh Mayfield Rd., Edinburgh, U.K.
T.W. Ryan
Affiliation:
Department of Physics, University of Edinburgh Mayfield Rd., Edinburgh, U.K.
S.J. Miles
Affiliation:
Department of Physics, University of Durham South Rd., Durham, U.K.
B.K. Tanner
Affiliation:
Department of Physics, University of Durham South Rd., Durham, U.K.
Get access

Abstract

X-ray scattering techniques at grazing incidence have been used to characterize single quantum well hetero–structures. Double–and triple-axis diffractometry has been used to determine lattice mismatch and layer thickness of a 250Å thick layer of AlInAs grown by MBE on an InP substrate and capped by a 45Å GaAs layer. Reflectivity measurements in the triple – crystal mode permit accurate measurement of individual layer thicknesses, relative electron density and interface roughnesses on the Angstrom level.

Type
II. Characterization of Thin Films by XRD and XRF
Information
Advances in X-Ray Analysis , Volume 31: Thirty-Sixth Annual Conference on Applications of X-ray Analysis, August 3-7, 1987 , 1987 , pp. 155 - 160
Copyright
Copyright © International Centre for Diffraction Data 1987

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Tanner, B.K., Double Crystal X-rày Diffraction and Topography, in: “Analysis for the development of microelectronic devices”,Grasserbauer, M. and H-Werner, eâs., Wiley, Chichester.Google Scholar
2. Hill, M.J., Tanner, B.K., Halliwell, M.A.G. and Lyons, M.H., Simulation of X-ray double crystal rocking curves of multiple and inhomogeneous epitaxial layers, J. Appl. Cryst., l8 (1985) 446 Google Scholar
3. Pine, B-M., Materials analysis with x-ray rocking curvas. Mat. Res. Soc, symp. Proc. 69 (1986) 39 Google Scholar
4. Tanner, B.K. and Hill, M.J., X-ray double crystal diffractometry of multiple and very thin heteroepitaxial layers, Adv. X-ray Anal. 29 (1936) 337 Google Scholar
5. Chu, X. and Tanner, B.K., Interference effects in double crystal X-ray rocking curves of GaAlÂs/GaAs laser structures Appl. Phvs. Letts. 49 (1986) 1773Google Scholar
6. Halliwell, M.A.G. and Lyons, M.H., Double crystal diffractometry of III-V semiconductor device structures, Inst. Phvs. Conf. Ser. 76 (1985) 445 Google Scholar
7. Hill, M.J. and Tanner, B.K., Double axis X-ray diffractometry at glancing angles J. Phys. P.- Appl. Phys. 19 (1986) L229Google Scholar
8. Ryan, T.W., Hatton, P.D., Bates, S., Watt, M., Sotomayor-Torres, C., Claxton, P.A a Roberts, J.S., X-ray scattering from a single-quantum-well bemicond. Sei. Technol. 2 (1957) 241 Google Scholar
9. Kiessig, H., Interferenz van Röntgenstrahlen an dünnen schichten Ann. Physik 10 (1931) 715 Google Scholar
10. Cowley, R.A. and Ryan, T.W., X-ray scattering studies of thin films and surfaces, J.Phys. D:Appl. Phys. 20 (1987) 61Google Scholar
11. Lucas, C.A., Hatton, P.D., Bates, S., Ryan, T.W., Miles, S.J. and Tanrer, B.K., Characterization of nanometer-scale epitaxial structures by grazing incidence X-ray diffraction and specular reflectivity, J. Appl. Phys. SubmittedGoogle Scholar
12. Ryan, T.W., Ph.D. Thesis, Edinburgh University (1986) Work supported by the Science S Engineering Research CouncilGoogle Scholar