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Fundamental Parameter-Based X-ray Fluorescence Analysis of Thin and Multilayer Samples

Published online by Cambridge University Press:  06 March 2019

D. K. G. de Boer  and
P. N. Brouwer
D. K. G. de Boer
Affiliation:
Philips Research Laboratories P.O. Box 80000, 5600 JA Eindhoven, The Netherlands
P. N. Brouwer
Affiliation:
Philips Research Laboratories P.O. Box 80000, 5600 JA Eindhoven, The Netherlands
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Extract

The Fundamental Parameter-based calculation of x-ray fluorescence intensities for thin and multilayer samples is performed with new formulas. By the calculations it is shown that both intra- and inter-layer secondary fluorescence can cause significant enhancement. With a method based on the discussed theory, it is possible to determine the composition and layer thicknesses of multilayer samples. Analyses are discussed of samples from IC technology and magnetic recording. Furthermore, the angular dependence of intensities is calculated, in good agreement with experiments performed with a novel spectrometer.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 237 - 245
Copyright
Copyright © International Centre for Diffraction Data 1989

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