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Texture Analysis of Thin Films and Surface Layers by Low Incidence Angle X-ray Diffraction

Published online by Cambridge University Press:  06 March 2019

J. J. Heizmann
Affiliation:
Laboratoire de Métallurgie Physique et Chimique Centre de Métallurgie Structurale 57 045 - Metz University - France
A. Vadon
Affiliation:
Laboratoire de Métallurgie Physique et Chimique Centre de Métallurgie Structurale 57 045 - Metz University - France
D. Schlatter
Affiliation:
Laboratoire de Métallurgie Physique et Chimique Centre de Métallurgie Structurale 57 045 - Metz University - France
J. Bessières
Affiliation:
Laboratoire de Métallurgie Physique et Chimique Centre de Métallurgie Structurale 57 045 - Metz University - France
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Extract

It is necessary to know the orientation of thin surface layers for the electronic industry as well as for different studies on interphases (epitaxy, topotaxy, phase transformation, reactivity of solids).

It is difficult to obtain information with a conventional Schulz goniometer (Bragg-Brentano geometry) because of the insufficient amount of diffracting material.

Type
VI. Analysis of Thin Films by XRD and XRF
Copyright
Copyright © International Centre for Diffraction Data 1988

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References

1. Schulz, L.G., J. Appl. Phys., 20, 1030-1036 (1949).Google Scholar
2. Segmüller, A. and Murakami, M., “Characterisation of Thin Film by X-Ray Diffraction” in ”Thin Films from Free Atoms and Particles,” Klabunde, J., ed. , Academic Press, New York, 325351 (1985).CrossRefGoogle Scholar
3. Hyiengar, S.S., Santana, M.W., Windischmann, H. and Engler, P., in “Adv. in X-ray Anal., 30, 457-464 (1987).Google Scholar
4. Heizmann, J.J. and Laruelle, C., J. Appl, Cryst., 19, 467-472 (1986).CrossRefGoogle Scholar
5. Vadon, A., Ruer, D. and Baro, R., 30th Annual Denver Conference on Application of X-ray Analysis, (1981).Google Scholar
6. Heizmann, J.J., Laruelle, C. and Vadon, A., Analysis, 16, n°, 6, 334340 (1988).Google Scholar

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