Skip to main content Accessibility help
×
Hostname: page-component-8448b6f56d-jr42d Total loading time: 0 Render date: 2024-04-24T14:13:56.523Z Has data issue: false hasContentIssue false

12 - Depth Profiling

Published online by Cambridge University Press:  21 September 2017

T. Mitch Wallis
Affiliation:
National Institute of Standards and Technology, Boulder
Pavel Kabos
Affiliation:
National Institute of Standards and Technology, Boulder
Get access

Summary

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Chapter
Information
Publisher: Cambridge University Press
Print publication year: 2017

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Persico, R., Introduction to Ground Penetrating Radar (Wiley, 2014).Google Scholar
Reznik, A. N. and Yurasova, N. V., “Near-Field Microwave Tomography of Biological Objects,” Technical Physics 49 (2004) pp. 485493.CrossRefGoogle Scholar
Gaikovich, K. P., “Subsurface Near-Field Scanning Tomography,” Physical Review Letters 98 (2007) art. no. 183902.Google ScholarPubMed
Amineh, R. K., Khalatpour, A., Xu, H., Baskharoun, Y., and Nikolova, N. K., “Three-Dimensional Near-Field Microwave Holography for Tissue Imaging,” International Journal of Biomedical Imaging (2012) pp. 111.CrossRefGoogle ScholarPubMed
Shekhawat, G. S. and Dravid, V. P., “Nanoscale Imaging of Buried Structures via Scanning Near-Field Ultrasound Holography,” Science 310 (2005) pp. 8992.Google Scholar
Sommerfeld, A., Partial Differential Equations in Physics (Academic Press, 1964), Cho Chew, W., Waves and Fields in Inhomogeneous Media (Van Nostrand Reinhold, 1990).Google Scholar
Bethe, H. A., “Theory of Diffraction by Small Holes,” Physical Review 66 (1944) pp. 163182.Google Scholar
Levine, H. and Schwinger, J., “On the Theory of Electromagnetic Wave Diffraction by a Small Aperture in an Infinite Plane Conducting Screen,” Communication on Pure and Applied Mathematics 3 (1950) pp. 355391.Google Scholar
Bouwkamp, C. J., “Diffraction Theory,” Reports on Progress in Physics 17 (1954) pp. 35100.CrossRefGoogle Scholar
Klimov, V. V. and Letokhov, V. S., “A Simple Theory of the Near-Field in Diffraction by a Round Aperture,” Optics Communications 106 (1994) pp. 151154.CrossRefGoogle Scholar
Colton, D. and Kress, R., Inverse Acoustic and Electromagnetic Scattering Theory (Springer-Verlag, 1992).Google Scholar
Gaikovich, K. P., “Scanning Near-Field Electromagnetic Tomography,” Journal of Nano and Microsystems Technique 8 (2007) pp. 5065 (in Russian).Google Scholar
Tikhonov, A. N., Goncharsky, A. V., Stepanov, V. V., and Yagola, A. G., Numerical Methods for the Solution of Ill-Posed Problems (Kluwer Academic Publishers, 1995).Google Scholar
Tikhonov, A. N., Leonov, A. S., and Yagola, A. G., Nonlinear Ill-Posed Problems Volumes 1 and 2 (Chapman and Hall, 1998).Google Scholar
Kirch, A. and Kress, R., “A Numerical Method for an Inverse Scattering Problem.” In Inverse Problems, (Engl and Groetsch, eds.) (Academic Press, 1987) pp. 279290.Google Scholar
Angell, T. S., Kleinman, R. E., and Roach, G. P., “An Inverse Transmission Problem for Helmholtz Equation,” Inverse Problems 3 (1987) pp. 149180.Google Scholar
Colton, D. and Monk, P., “A Novel Method for Solving the Inverse Scattering Problem for Time-Harmonic Acoustic Waves in the Resonance Region,” SIAM Journal on Applied Mathematics 45 (1985) pp. 10391053.CrossRefGoogle Scholar
van den Berg, P. M. and Kleinman, R. E., “A Contrast Source Inversion Method,” Inverse Problems 13 (1997) pp. 16071620.CrossRefGoogle Scholar
Belkebir, K., Kleinman, R. E., and Pichot, Ch., “Microwave Imaging – Location and Shape Reconstruction from Multifrequency Scattering Data,” IEEE Transactions on Microwave Theory and Techniques 45 (1997) pp. 469476.CrossRefGoogle Scholar
Gayday, Yu., Sidorenko, V., Sinkevych, O., and Semenets, Yu., “Form Preserving Regularization in Near-Field Microwave Microscopy Inverse Problems,” Radiophysics and Electronics 16 (2011) pp. 1719.Google Scholar
Gayday, Yu. A., Sidorenko, V. S., and Sinkevych, O. V., “Near-Field Microwave Tomography of Subsurface Dielectric Layers,” Radioelectronics and Communications Systems 55 (2012) pp. 131135.CrossRefGoogle Scholar
Gaikovich, K. P., Gaikovich, P. K., Maksimovitch, Ye. S., and Badeev, V. A., “Multifrequency Microwave Tomography of Absorbing Inhomogeneities,” Proceedings of Ultrawideband and Ultrashort Impulse Signals (2010) pp. 156158.Google Scholar
Gaikovich, K. P. and Gaikovich, P. K., “Inverse Problem of Near-Field Scattering in Multilayer Media,” Inverse Problems 26 (2010) art. no. 125013.CrossRefGoogle Scholar
Gaikovich, K. P., Gaikovich, P. K., Maksimovitch, Ye. S., and Badeev, V. A., “Pseudopulse Near-Field Subsurface Tomography,” Physical Review Letters 108 (2012) art. no. 163902.CrossRefGoogle ScholarPubMed
Vdovicheva, N. D., Reznik, A. N., and Shereshevskii, I. A., “Numerical Method for the Inverse Problem of Near-Field Microscopy of Layered Media,” International Conference Days on Diffraction 2011, St. Petersburg, May 30–June 3, 2011.Google Scholar
Reznik, A. N., “Quasistatics and Electrodynamics of Near-Field Microwave Microscope,” Journal of Applied Physics 115 (2014) art. no. 084501.Google Scholar
Reznik, A. N., Shereshevskii, I. A., and Vdovicheva, N. D., “The Near-Field Microwave Technique for Deep Profiling of Free Carrier Concentration in Semiconductors,” Journal of Applied 109 (2011) art. no. 094508.CrossRefGoogle Scholar
Vlahacos, C. P., Black, R. C., Anlage, S. M., Amar, A., and Wellstood, F. C., “Near-Field Scanning Microwave Microscope with 100 mm Resolution,” Applied Physics Letters 69 (1996) pp. 32723274.CrossRefGoogle Scholar
Kopanski, J. J. and Mayo, S., “Intermittent-Contact Scanning Capacitance Microscope for Lithographic Overlay Measurement,” Applied Physics Letters 72 (1998) pp. 24692471.Google Scholar
Plassard, C., Bourillot, E., Rossignol, J., Lacroute, Y., Lepleux, E., Pacheco, L., and Lesniewska, E., “Detection of Defects Buried in Metallic Samples by Scanning Microwave Microscopy,” Physical Review B 83 (2011) art. no. 121409(R).CrossRefGoogle Scholar
Rossignol, J., Plassard, C., Bourillot, E., Calonne, O., Foucault, M., and Lesniewska, E., “Imaging of Located Buried Defects in Metal Samples by Scanning Microwave Microscopy,” Procedia Engineering 25 (2011) pp. 16371640.CrossRefGoogle Scholar
Rossignol, J., Plassard, C., Bourillot, E., Calonne, O., Foucault, M., and Lesniewska, E., “Non-destructive Technique to Detect Local Buried Defects in Metal Sample by Scanning Microwave Microscopy,” Sensors and Actuators A 186 (2012) pp. 219222.CrossRefGoogle Scholar
Kopanski, J., You, L., Ahn, J.-J, Hitz, E., and Obeng, Y., “Scanning Probe Microscopes for Subsurface Imaging,” ECS Transactions 61 (2014) pp. 185193.CrossRefGoogle Scholar
You, L., Ahn, J.-J., Obeng, Y. S. and Kopanski, J. J., “Subsurface Imaging of Metal Lines Embedded in a Dielectric with a Scanning Microwave Microscope,” Journal of Physics D: Applied Physics 49 (2016) art. no. 045502.Google Scholar
Chisum, J. and. Popovic, Z., “Performance Limitations and Measurement Analysis of a Near-Field Microwave Microscope for Nondestructive and Subsurface Detection,” IEEE Transactions on Microwave Theory and Techniques 60 (2012) pp. 26052615.CrossRefGoogle Scholar
Anlage, S. M., Talanov, V. V., and Schwartz, A. R., “Principles of Near-Field Microwave Microscopy.” In Scanning Probe Microscopy: Electrical and Electrochemical Phenomena at the Nanoscale, Volume 1, (Kalinin, and Gruverman, , eds.) (Springer Verlag, 2007) pp. 215253.CrossRefGoogle Scholar
Gramse, G., Brinciotti, E., Lucibello, A., Patil, S. B., Kasper, M., Rankl, C., Giridharagopal, R., Hinterdorfer, P., Marcelli, R. and Kienberger, F., “Quantitative Sub-surface and Non-contact Imaging Using Scanning Microwave Microscopy,” Nanotechnology 26 (2015) art. no. 135701.Google Scholar
Zhao, M., Gu, X., Lowther, S. E., Park, Ch., Jean, Y. C. and Nguyen, T., “Subsurface Characterization of Carbon Nanotubes in Polymer Composites via Quantitative Electric Force Microscopy,” Nanotechnology 21 (2010) art. no. 225702.Google ScholarPubMed

Save book to Kindle

To save this book to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Available formats
×

Save book to Dropbox

To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Dropbox.

Available formats
×

Save book to Google Drive

To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Google Drive.

Available formats
×