Book contents
- Frontmatter
- Contents
- PREFACE
- ACKNOWLEDGMENTS
- CHAPTER 1 INTRODUCTION
- CHAPTER 2 RADIATION AND SCATTERING AT EUV AND SOFT X-RAY WAVELENGTHS
- CHAPTER 3 WAVE PROPAGATION AND REFRACTIVE INDEX AT EUV AND SOFT X-RAY WAVELENGTHS
- CHAPTER 4 MULTILAYER INTERFERENCE COATINGS
- CHAPTER 5 SYNCHROTRON RADIATION
- CHAPTER 6 PHYSICS OF HOT DENSE PLASMAS
- CHAPTER 7 EXTREME ULTRAVIOLET AND SOFT X-RAY LASERS
- CHAPTER 8 COHERENCE AT SHORT WAVELENGTHS
- CHAPTER 9 SOFT X-RAY MICROSCOPY WITH DIFFRACTIVE OPTICS
- CHAPTER 10 EXTREME ULTRAVIOLET AND X-RAY LITHOGRAPHY
- APPENDIX A UNITS AND PHYSICAL CONSTANTS
- APPENDIX B ELECTRON BINDING ENERGIES, PRINCIPAL K-AND L-SHELL EMISSION LINES, AND AUGER ELECTRON ENERGIES
- APPENDIX C ATOMIC SCATTERING FACTORS, ATOMIC ABSORPTION COEFFICIENTS, AND SUBSHELL PHOTOIONIZATION CROSS-SECTIONS
- APPENDIX D MATHEMATICAL AND VECTOR RELATIONSHIPS
- APPENDIX E SOME INTEGRATIONS IN k, ω-SPACE
- APPENDIX F LORENTZ SPACE–TIME TRANSFORMATIONS
- INDEX
- Periodic Table
- Plate section
PREFACE
Published online by Cambridge University Press: 05 June 2012
- Frontmatter
- Contents
- PREFACE
- ACKNOWLEDGMENTS
- CHAPTER 1 INTRODUCTION
- CHAPTER 2 RADIATION AND SCATTERING AT EUV AND SOFT X-RAY WAVELENGTHS
- CHAPTER 3 WAVE PROPAGATION AND REFRACTIVE INDEX AT EUV AND SOFT X-RAY WAVELENGTHS
- CHAPTER 4 MULTILAYER INTERFERENCE COATINGS
- CHAPTER 5 SYNCHROTRON RADIATION
- CHAPTER 6 PHYSICS OF HOT DENSE PLASMAS
- CHAPTER 7 EXTREME ULTRAVIOLET AND SOFT X-RAY LASERS
- CHAPTER 8 COHERENCE AT SHORT WAVELENGTHS
- CHAPTER 9 SOFT X-RAY MICROSCOPY WITH DIFFRACTIVE OPTICS
- CHAPTER 10 EXTREME ULTRAVIOLET AND X-RAY LITHOGRAPHY
- APPENDIX A UNITS AND PHYSICAL CONSTANTS
- APPENDIX B ELECTRON BINDING ENERGIES, PRINCIPAL K-AND L-SHELL EMISSION LINES, AND AUGER ELECTRON ENERGIES
- APPENDIX C ATOMIC SCATTERING FACTORS, ATOMIC ABSORPTION COEFFICIENTS, AND SUBSHELL PHOTOIONIZATION CROSS-SECTIONS
- APPENDIX D MATHEMATICAL AND VECTOR RELATIONSHIPS
- APPENDIX E SOME INTEGRATIONS IN k, ω-SPACE
- APPENDIX F LORENTZ SPACE–TIME TRANSFORMATIONS
- INDEX
- Periodic Table
- Plate section
Summary
This book is intended to provide an introduction to the physics and applications of soft x-rays and extreme ultraviolet (EUV) radiation. These short wavelengths are located within the electromagnetic spectrum between the ultraviolet, which we commonly associate with sunburn, and harder x-rays, which we often associate with medical and dental imaging. The soft x-ray/EUV region of the spectrum has been slow to develop because of the myriad atomic resonances and concomitant short absorption lengths in all materials, typically of order one micrometer or less. This spectral region, however, offers great opportunities for both science and technology. Here the wavelengths are considerably shorter than visible or ultraviolet radiation, thus permitting one to see smaller features in microscopy, and to write finer patterns in lithography. Furthermore, optical techniques such as high spatial resolution lenses and high reflectivity mirrors have been developed that enable these applications to a degree not possible at still shorter wavelengths. Photon energies in the soft x-ray/EUV spectral region are well matched to primary resonances of essentially all elements. While this leads to very short absorption lengths, typically one micrometer or less, it provides a very accurate means for elemental and chemical speciation, which is essential, for instance, in the surface and environmental sciences. Interestingly, water is relatively transparent in the spectral region below the oxygen absorption edge, providing a natural contrast mechanism for imaging carbon-containing material in the spectral window extending from 284 to 543 eV. This provides interesting new opportunities for both the life and the environmental sciences.
- Type
- Chapter
- Information
- Soft X-Rays and Extreme Ultraviolet RadiationPrinciples and Applications, pp. xiii - xivPublisher: Cambridge University PressPrint publication year: 1999