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7 - Practical ASAT

from Core Section

Published online by Cambridge University Press:  03 March 2022

Thomas F. Kelly
Affiliation:
Steam Instruments, Inc.
Brian P. Gorman
Affiliation:
Colorado School of Mines
Simon P. Ringer
Affiliation:
University of Sydney
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Summary

This chapter looks, not at the big picture, but at the details of an operational ASAT instrument. Can specimens withstand repeated STEM/APT cycling? Is an integrated STEM/APT instrument needed or can they be coupled by a vacuum transport? Will specimen evolution models suffice to deliver a realistic model of the specimen shape throughout an ASAT experiment? In an integrated instrument, can APT and STEM be operated simultaneously? Concerns about radiation damage in ASAT experiments and means for mitigating these effects are explored. The role of electron diffraction in ASAT is considered, and it is seen as an important adjunct to atom probe crystallography. The importance of complementary analytical information such as EDS and especially EELS is illustrated. Since atom probe tomography is a compositional mapping tool, EELS as a chemical mapping tool takes on added import. The interplay among the many elements of ASAT and its intrinsic correlative microscopy opportunities serve as an internal check on results. A synergistic ecosystem of AST information with chemical information correlated with physical properties and image simulations defines the opportunity inherent in Atomic-Scale Analytical Tomography.

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Chapter
Information
Atomic-Scale Analytical Tomography
Concepts and Implications
, pp. 125 - 144
Publisher: Cambridge University Press
Print publication year: 2022

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References

Arslan, I., Marquis, E. A., Homer, M., Hekmaty, M. A., and Bartelt, N. C., “Towards Better 3-D Reconstructions by Combining Electron Tomography and Atom-Probe Tomography,” Ultramicroscopy, vol. 108, no. 12, pp. 15791585, Nov. 2008, doi: https://doi.org/10.1016/j.ultramic.2008.05.008.CrossRefGoogle ScholarPubMed
Gorman, B. P., Diercks, D., Salmon, N. et al., “Hardware and Techniques for Cross-Correlative TEM and Atom Probe Analysis,” Microsc. Today, vol. 16, no. 1–4, pp. 4247, 2008.CrossRefGoogle Scholar
Gorman, B. P., Puthucode, A., Diercks, D. R., and Kaufman, M. J., “Cross-correlative TEM and Atom Probe Analysis of Partial Crystallisation in NiNbSn Metallic Glasses,” Mater. Sci. Technol., vol. 24, no. 6, pp. 682688, Jun. 2008, doi: https://doi.org/10.1179/174328408x293595.CrossRefGoogle Scholar
Lefebvre, W. et al., “HAADF–STEM Atom Counting in Atom Probe Tomography Specimens: Towards Quantitative Correlative Microscopy,” Ultramicroscopy, vol. 159, pp. 403412, 2015, doi: https://doi.org/10.1016/j.ultramic.2015.02.011.CrossRefGoogle ScholarPubMed
Katnagallu, S. et al., “Imaging Individual Solute Atoms at Crystalline Imperfections in Metals,” New J. Phys., vol. 21, no. 12, p. 123020, Dec. 2019, doi: https://doi.org/10.1088/1367-2630/ab5cc4.CrossRefGoogle Scholar
Haley, D., Petersen, T., Ringer, S. P., and Smith, G. D. W., “Atom Probe Trajectory Mapping Using Experimental Tip Shape Measurements,” J. Microsc., vol. 244, no. 2, pp. 170180, Nov. 2011, doi: https://doi.org/10.1111/j.1365-2818.2011.03522.x.CrossRefGoogle ScholarPubMed
Haley, D., Moody, M. P., and Smith, G. D. W., “Level Set Methods for Modelling Field Evaporation in Atom Probe,” Microsc. Microanal., vol. 19, no. 6, pp. 17091717, 2013.CrossRefGoogle ScholarPubMed
Vurpillot, F., “Private Communication, Université de Rouen,” presented at the test1, University of Rouen, 2016, [Online]. Available: test2.Google Scholar
Gorman, B. P., “Systems and Methods of Aberration Correction for Atom Probe Tomography,” US Patent: US20190318907A1, Oct. 17, 2019.Google Scholar
Larson, D. J. et al., “Field-Ion Specimen Preparation Using Focused Ion-Beam Milling,” Ultramicroscopy, vol. 79, pp. 287293, 1999.CrossRefGoogle Scholar
Miller, M. K., Russell, K. F., Thompson, K., Alvis, R., and Larson, D. J., “Review of Atom Probe FIB-Based Specimen Preparation Methods,” Microsc. Microanal., vol. 13, no. 6, pp. 428436, Nov. 2007, doi: https://doi.org/10.1017/S1431927607070845.CrossRefGoogle ScholarPubMed
Thompson, K., Lawrence, D. J., Larson, D. J. et al., “In-Situ Site-Specific Specimen Preparation for Atom Probe Tomography,” Ultramicroscopy, vol. 107, no. 2–3, pp. 131139, 2007.CrossRefGoogle ScholarPubMed
Prosa, T. J. and Larson, D. J., “Modern Focused-Ion-Beam-Based Site-Specific Specimen Preparation for Atom Probe Tomography,” Microsc. Microanal., vol. 23, no. 2, 2017, doi: https://doi.org/10.1017/S1431927616012642.CrossRefGoogle ScholarPubMed
Burton, G. L., Ricote, S., Foran, B. J., Diercks, D. R., and Gorman, B. P., “Quantification of Grain Boundary Defect Chemistry in a Mixed Proton-Electron Conducting Oxide Composite,” J. Am. Ceram. Soc., vol. 103, no. 5, pp. 32173230, 2020, doi: https://doi.org/10.1111/jace.17014.CrossRefGoogle Scholar
Larson, D. J., Camus, P. P., and Kelly, T. F., “Scanning Electron Microscopy in Very High Electric Fields Near Field Ion/Emission Specimens,” in 53rd Annual Meeting of the Microscopy Society of America, 1995, pp. 624625.CrossRefGoogle Scholar
Kirchhofer, R., Diercks, D. R., and Gorman, B. P., “Electron Diffraction and Imaging for Atom Probe Tomography,” Rev. Sci. Instrum., vol. 89, no. 5, p. 053706, May 2018, doi: https://doi.org/10.1063/1.4999484.CrossRefGoogle ScholarPubMed
Dunin-Borkowski, R. E., Kasama, T., McCartney, M. R., and Smith, D. J., “Electron Holography,” in Science of Microscopy, 2 vols., Hawkes, P. W. and Spence, J. C. H., eds. New York: Springer, 2007, pp. 11411195.CrossRefGoogle Scholar
Beleggia, M., Kasama, T., Larson, D. J. et al., “Towards Quantitative Off-Axis Electron Holographic Mapping of the Electric Field around the Tip of a Sharp Biased Metallic Needle,” J. Appl. Phys., vol. 116, no. 2, p. 024305, 2014, doi: https://doi.org/10.1063/1.4887448.CrossRefGoogle Scholar
Zheng, F., Migunov, V., Caron, J. et al., “Three-Dimensional Electric Field Mapping of an Electrically Biased Atom Probe Needle Using Off-Axis Electron Holography,” Microsc. Microanal., vol. 25, no. S2, pp. 326327, 2019, doi: https://doi.org/10.1017/S1431927619002368.CrossRefGoogle Scholar
Rose, H., “Nonstandard Imaging Methods in Electron Microscopy,” Ultramicroscopy, vol. 2, pp. 251267, Jan. 1976, doi: https://doi.org/10.1016/S0304-3991(76)91538-2.CrossRefGoogle Scholar
MacLaren, I. et al., “On the Origin of Differential Phase Contrast at a Locally Charged and Globally Charge-Compensated Domain Boundary in a Polar-Ordered Material,” Ultramicroscopy, vol. 154, pp. 5763, Jul. 2015, doi: https://doi.org/10.1016/j.ultramic.2015.03.016.CrossRefGoogle Scholar
Lubk, A. and Zweck, J., “Differential Phase Contrast: An Integral Perspective,” Phys. Rev. A, vol. 91, no. 2, p. 023805, Feb. 2015, doi: https://doi.org/10.1103/PhysRevA.91.023805.CrossRefGoogle Scholar
Gault, B., Moody, M. P., Cairney, J. M., and Ringer, S. P., “Atom Probe Crystallography,” Mater. Today, vol. 15, no. 9, pp. 378386, Sep. 2012.CrossRefGoogle Scholar
Geiser, B. P., Kelly, T. F., Larson, D. J., Schneir, J., and Roberts, J. P., “Spatial Distribution Maps for Atom Probe Tomography,” Microsc. Microanal., vol. 13, no. 6, pp. 437447, 2007.CrossRefGoogle ScholarPubMed
Babinsky, K., De Kloe, R., Clemens, H., and Primig, S., “A Novel Approach for Site-Specific Atom Probe Specimen Preparation by Focused Ion Beam and Transmission Electron Backscatter Diffraction,” Ultramicroscopy, vol. 144, pp. 918, Sep. 2014, doi: https://doi.org/10.1016/j.ultramic.2014.04.003.CrossRefGoogle ScholarPubMed
Burton, G. L., Wright, S., Stokes, A. et al., “Orientation Mapping with Kikuchi Patterns Generated from a Focused STEM Probe and Indexing with Commercially Available EDAX Software,” Ultramicroscopy, vol. 209, p. 112882, Feb. 2020, doi: https://doi.org/10.1016/j.ultramic.2019.112882.CrossRefGoogle ScholarPubMed
Herbig, M., Choi, P.-P., and Raabe, D., “Combining Structural and Chemical Information on the Nanometer Scale by Correlative TEM and APT,” Microsc. Microanal., vol. 19, no. S2, pp. 948949, 2013, doi: https://doi.org/10.1017/S1431927613006739.CrossRefGoogle Scholar
Rice, K. P., Keller, R. R., and Stoykovich, M. P., “Specimen-Thickness Effects on Transmission Kikuchi Patterns in the Scanning Electron Microscope,” J. Microsc., vol. 254, no. 3, pp. 129136, Jun. 2014, doi: https://doi.org/10.1111/jmi.12124.CrossRefGoogle ScholarPubMed
Herbig, M., Choi, P.-P., and Raabe, D., “Combining Structural and Chemical Information at the Nanometer Scale by Correlative Transmission Electron Microscopy and Atom Probe Tomography,” Ultramicroscopy, vol. 153, pp. 3239, Jun. 2015, doi: https://doi.org/10.1016/j.ultramic.2015.02.003.CrossRefGoogle ScholarPubMed
Chen, Y., Rice, K. P., Prosa, T. J., Marquis, E. A., and Reed, R. C., “Integrated APT/t-EBSD for Grain Boundary Analysis of Thermally Grown Oxide on a Ni-Based Superalloy,” Microsc. Microanal., vol. 21, no. Supplement S3, pp. 687688, Aug. 2015, doi: https://doi.org/10.1017/S1431927615004237.CrossRefGoogle Scholar
Rice, K. P., Chen, Y., Prosa, T. J., and Larson, D. J., “Implementing Transmission Electron Backscatter Diffraction for Atom Probe Tomography,” Microsc. Microanal., vol. 22, no. 03, pp. 583588, Jun. 2016, doi: https://doi.org/10.1017/S1431927616011296.CrossRefGoogle ScholarPubMed
Breen, A. J. et al., “Correlating Atom Probe Crystallographic Measurements with Transmission Kikuchi Diffraction Data,” Microsc. Microanal., vol. 23, no. 2, pp. 279290, 2017, doi: https://doi.org/10.1017/S1431927616012605.CrossRefGoogle ScholarPubMed
Guo, W. et al., “Correlative Energy-Dispersive X-Ray Spectroscopic Tomography and Atom Probe Tomography of the Phase Separation in an Alnico 8 Alloy,” Microsc. Microanal., vol. 22, no. 6, pp. 12511260, Dec. 2016, doi: https://doi.org/10.1017/S1431927616012496.CrossRefGoogle Scholar
Bachhav, M., Danoix, R., Danoix, F. et al., “Investigation of Wustite (Fe1-xO) by Femtosecond Laser Assisted Atom Probe Tomography,” Ultramicroscopy, vol. 111, pp. 584588, 2011.CrossRefGoogle ScholarPubMed
Bachhav, M., Danoix, F., Hannoyer, B., Bassat, J. M., and Danoix, R., “Investigation of O-18 Enriched Hematite (α-Fe2O3) by Laser Assisted Atom Probe Tomography,” Int. J. Mass Spectrom., vol. 335, pp. 5760, Feb. 2013, doi: https://doi.org/10.1016/j.ijms.2012.10.012.CrossRefGoogle Scholar
Keast, V. J., Scott, A. J., Brydson, R., Williams, D. B., and Bruley, J., “Electron Energy-Loss Near-Edge Structure – a Tool for the Investigation of Electronic Structure on the Nanometre Scale,” J. Microsc., vol. 203, no. 2, pp. 135175, Aug. 2001, doi: https://doi.org/10.1046/j.1365-2818.2001.00898.x.CrossRefGoogle ScholarPubMed
Jarausch, K., Thomas, P., Leonard, D. N., Twesten, R., and Booth, C. R., “Four-Dimensional STEM-EELS: Enabling Nano-scale Chemical Tomography,” Ultramicroscopy, vol. 109, no. 4, pp. 326337, Mar. 2009, doi: https://doi.org/10.1016/j.ultramic.2008.12.012.CrossRefGoogle ScholarPubMed
Binev, P., Dahmen, W., DeVore, R. et al., “Compressed Sensing and Electron Microscopy,” in Modeling Nanoscale Imaging in Electron Microscopy, Vogt, T., Dahmen, W., and Binev, P., eds. Springer US, 2012, pp. 73126.CrossRefGoogle Scholar
Leary, R., Saghi, Z., Midgley, P. A., and Holland, D. J., “Compressed Sensing Electron Tomography,” Ultramicroscopy, vol. 131, pp. 7091, Aug. 2013, doi: https://doi.org/10.1016/j.ultramic.2013.03.019.CrossRefGoogle ScholarPubMed
Saghi, Z. et al., “Compressed Sensing Electron Tomography of Needle-Shaped Biological Specimens – Potential for Improved Reconstruction Fidelity with Reduced Dose,” Ultramicroscopy, vol. 160, pp. 230238, Jan. 2016, doi: https://doi.org/10.1016/j.ultramic.2015.10.021.CrossRefGoogle ScholarPubMed
Egerton, R. F., Li, P., and Malac, M., “Radiation Damage in the TEM and SEM,” Micron, vol. 35, no. 6, pp. 399409, 2004, doi: https://doi.org/10.1016/j.micron.2004.02.003.CrossRefGoogle ScholarPubMed
Rose, H., “Outline of a Spherically Corrected Semiaplanatic Medium-Voltage TEM,” Optik, vol. 85, pp. 1924, 1990.Google Scholar
Bell, D. C., Mankin, M., Day, R. W., and Erdman, N., “Successful Application of Low Voltage Electron Microscopy to Practical Materials Problems,” Ultramicroscopy, vol. 145, pp. 5665, Oct. 2014, doi: https://doi.org/10.1016/j.ultramic.2014.03.005.CrossRefGoogle ScholarPubMed
Lee, Z., Rose, H., Lehtinen, O., Biskupek, J., and Kaiser, U., “Electron Dose Dependence of Signal-to-Noise Ratio, Atom Contrast and Resolution in Transmission Electron Microscope Images,” Ultramicroscopy, vol. 145, pp. 312, Oct. 2014, doi: https://doi.org/10.1016/j.ultramic.2014.01.010.CrossRefGoogle ScholarPubMed
Hren, J. J., “Barriers to AEM: Contamination and Etching,” in Introduction to Analytical Electron Microscopy, Hren, J. J, Goldstein, J. I, and Joy, D. C, eds. New York: Plenum Press, 1979, pp. 481505.CrossRefGoogle Scholar
Wall, J. S., “Contamination in the STEM at Ultra High Vacuum,” Scanning Electron Microsc.-1980, pp. 99106, 1980.Google Scholar

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