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6 - Instrumentation for ASAT

from Core Section

Published online by Cambridge University Press:  03 March 2022

Thomas F. Kelly
Affiliation:
Steam Instruments, Inc.
Brian P. Gorman
Affiliation:
Colorado School of Mines
Simon P. Ringer
Affiliation:
University of Sydney
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Summary

Based on the discussion in Chapters 4 and 5, combining information from both electron microscopy, presumably (Scanning) Transmission Electron Microscopy ((S)TEM), and Atom Probe Tomography (APT) is a likely path toward ASAT. Experimentally, concurrent (S)TEM and APT may appear to be a straightforward experiment, but the instrumentation required can be complex and require significant capital investment. In this chapter, we consider what instrumentation is necessary for each technique and what could be done to both simplify and improve the ASAT technique in a combined instrument that solves many of the complexities in experimentation. Experimental conditions such as vacuum pressure, cryogenic temperatures, electron imaging and diffraction, laser wavelength and positioning, and specimen holder designs must all be taken into account.

Type
Chapter
Information
Atomic-Scale Analytical Tomography
Concepts and Implications
, pp. 98 - 124
Publisher: Cambridge University Press
Print publication year: 2022

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