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9 - Experimental Metrics for ASAT

from Core Section

Published online by Cambridge University Press:  03 March 2022

Thomas F. Kelly
Affiliation:
Steam Instruments, Inc.
Brian P. Gorman
Affiliation:
Colorado School of Mines
Simon P. Ringer
Affiliation:
University of Sydney
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Summary

We proposed in Chapter 5 that a combination of STEM and APT is the most likely method through which ASAT could be achieved, using either APT-centric atomic positioning or STEM-centric atom positioning. The approaches laid out are expected to achieve ASAT at some level, but we cannot expect absolute perfection since all experimental techniques have limitations. Limitations may be due either to the underlying physics (physical) or due to the technology available (technical). It is important to consider these limitations to understand where improvements might be made if limited primarily by the technology (technical). This chapter explores the most significant of these potential limitations using both APT- and STEM-centric atom positioning methods. Changes to experimental best practices as well as forward-looking advances in hardware and software are needed in order to achieve ASAT.

Type
Chapter
Information
Atomic-Scale Analytical Tomography
Concepts and Implications
, pp. 160 - 198
Publisher: Cambridge University Press
Print publication year: 2022

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